Semiconductor equipment MOCVD thermal field solution
Metal Organic Chemical Vapor Deposition (MOCVD) is a chip epitaxial technology for preparing mixed semiconductor devices, metal and metal oxide and metal nitride film materials. The heating system is an important part of the MOCVD equipment. Whether it can heat the substrate quickly and uniformly directly affects the quality of film deposition, thickness consistency, and chip performance. The rhenium alloy under Rheniumet has 10 years of professional production technology experience in the production of rhenium heaters for MOCVD and a complete quality control management system. It is a substitute for imported big-name or original parts of rhenium heaters for MOCVD and can carry out OEM full-process foundry. It is the number one domestic manufacturer with the most technical development strength and quality assurance ability.